Joon-wan Kim was born in Seoul, Korea in 1974. He attended the Pohang University of Science and Technology in the Department of Mechanical Engineering and received his degree of Bachelor of Science in 1999. As a research student, He joined the Department of Precision Engineering, Graduate School of Engineering, the University of Tokyo in 1999 and entered the master course in 2000. He received the degree of Master of Science in 2002 and his Ph.D. at the same department in 2005. From 2002 to 2005, he was also a Junior Research Associate at Materials Fabrication Laboratory, RIKEN. He was an assistant professor from 2005 to 2013 in Tokyo Institute of Technology. He has been an Associate Professor in the Institute of Innovative Research (IIR), Tokyo Institute of Technology. Prof. Kim
Research Field
MEMS, Micro Mechatronics, Bio Mechatronics
Advanced Micro-mechatronics by MEMS technology and its applications
Current Topics
  • ・ Micro hydraulic power source (micropump) driven by ECF jet
  • ・ Liquid cooling system by ECF micropump
  • ・ ECF flexible actuators (micro hands or micro manipulators)
  • ・ Focus-tunable ECF microlens by MEMS technology
  • ・ MEMS-based ECF micro rate gyroscopes
Current members
PhD candidate
Tatuya Matsubara
Zebing Mao
Huynh Huy Hoang
Master candidate
Masashi Ogawa
Yohei Shiota
Tadashi Narumi
Nguyen Khoa Nhat Dang
Shoutaro Okumura
Undergraduate students
Kazuki Ogata
Shota Ai
Mai Hamano
Graduate Students
NameDegree earnedYears
韓冬 (Dong Han)PhD2018
嵯峨 由彬 (Yoshiaki Saga)MS2018
佐藤 慧一 (Keiichi Satou)MS2018
清水 美咲 (Misaki Shimizu)MS2017
中川 卓也 (Takuya Nakagawa)MS2016
三栗野功大 (Koudai Mikurino)MS2015
近藤 一由 (Kazuyosi Kondo)MS2015
古木星哉 (Seiya Huruki)MS2015
Visiting Scholar
NameYearsCurrent position
刘毅 (Yi Liu)2016Associate professor


ECF Micropump by triangular prism and slit electrodes
Forced liquid cooling by ECF micropump
Focus-tunable microlens by ECF jet
ECF balloon-type microactuator
ECF eccentric tube-type microactuator
ECF micro rate gyroscope by MEMS technology
Flow visualization of ECF jet
ECF motors (C-RE type)
ECF finger and hand
Scaling law of ECF
Comparison of ECF micropump
3D-integrated ECF micropump
Micropump-integrated Balloon Type Microactuator
ECF rate gyroscope



Thapanun Sudhawiyangkul, Kazuhiro Yoshida, Sang In Eom, Joon-wan Kim, “A study on a hybrid structure flexible electro-rheological microvalve for soft microactuators,” Microsystem Technologies, In Press (2019),. https://doi.org/10.1007/s00542-019-04492-2

Tatsuya Matsubara, Huy Hoang Huynh, Kazuhiro Yoshida, Joon-wan Kim, “Development of MEMS-fabricated Bidirectional ECF (Electro-Conjugate Fluid) micropumps,” Sensors and Actuators A: Physical, In Press (2019),. https://doi.org/10.1016/j.sna.2019.06.022

Joon-wan Kim, Yusuke Tanabe, Shinichi Yokota, “Comprehending Electro-conjugate Fluid (ECF) Jets by Using the Onsager Effect,” Sensors and Actuators A: Physical, Vol.295 (2019), No.15, pp.266-273. https://doi.org/10.1016/j.sna.2019.06.013

Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim, “Developing O/O (oil-in-oil) droplet generators on a chip by using ECF (electro-conjugate fluid) micropumps,” Sensors and Actuators B: Chemical, Vol.296 (2019), pp.126669. https://doi.org/10.1016/j.snb.2019.126669

Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim, “Releasing large-area SU-8 structures without using any sacrificial layers,” Microelectronic Engineering, Vol.212 (2019), No.1, pp.53-60. https://doi.org/10.1016/j.mee.2019.04.006

Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim, “Fast packaging by a partially-crosslinked SU-8 adhesive tape for microfluidic sensors and actuators,” Sensors and Actuators A: Physical, Vol.289 (2019), No.15, pp.77-86. https://doi.org/10.1016/j.sna.2019.02.020

Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim, “Alleviation of the adhesive protrusion problem at the bonding interface of free-standing microstructures,” Journal of Mechanical Science and Technology, Vol.33 (2019), No.2, pp.749-757. https://doi.org/10.1007/s12206-019-0129-0

Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim, “A micro vertically-allocated SU-8 check valve and its characteristics,” Microsystem Technologies, Vol.25 (2019), No.1, pp.245-255. https://doi.org/10.1007/s00542-018-3958-3


Tomonobu Nagaoka, Zebing Mao, Kenjiro Takemura, Shinichi Yokota, Joon-Wan Kim, “ECF (electro-conjugate fluid) finger with bidirectional motion and its application to a flexible hand,” Smart Materials and Structures, Vol.28 (2018), No.2, pp.025032. https://doi.org/10.1088/1361-665X/aaf49a

Dong Han, Kazuhiro Yoshida, Joon-Wan Kim, “A Novel Hybrid Removal Technology for High-Aspect-Ratio SU-8 Micromolds in ECF (Electro-Conjugate Fluid) Micropumps Fabrication by UV-LIGA,” Journal of Microelectromechanical Systems, Vol.27 (2018), No.5, pp. 818-826. https://doi.org/10.1109/JMEMS.2018.2865201

Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim, “Study on the fabrication of a SU-8 cantilever vertically-allocated in a closed fluidic microchannel,” Microsystem Technologies, Vol.24 (2018), No.5, pp.2473-2483. https://doi.org/10.1007/s00542-017-3611-6


Benjamin Gorissen, Dominiek Reynaerts, Satoshi Konishi, Kazuhiro Yoshida, Joon‐Wan Kim, Michael De Volder, “Elastic inflatable actuators for soft robotic applications,” Advanced Materials, Vol.29 (2017), No.43, pp.1604977. https://doi.org/10.1002/adma.201604977

Dong Han, Yong Xia, Shinichi Yokota, Joon-wan Kim, “UV-LIGA technique for ECF micropumps using back UV exposure and self-alignment,” Journal of Micromechanics and Microengineering, Vol.27 (2017), No.12, pp.125008. https://doi.org/10.1088/1361-6439/aa8d9a

Kazuhiro Yoshida, Tomoyuki Sato, Sang In Eom, Joon-wan Kim, Shinichi Yokota, “A Study on an AC Electroosmotic Micropump Using a Square Pole − Slit Electrode Array,” Sensors and Actuators A: Physical, Vol.265 (2017), No.1, pp.152-160. https://doi.org/10.1016/j.sna.2017.08.026

Dong Han, Hongri Gu, Joon-wan Kim, Shinichi Yokota, “A bio-inspired 3D-printed hybrid finger with integrated ECF (electro-conjugate fluid) micropumps,” Sensors and Actuators A: Physical, Vol.257 (2017), No.15, pp.47-57. https://doi.org/10.1016/j.sna.2017.02.002

Seongsu Eom, Sang Min Park, Seon Jin Han, Joon Wan Kim, Dong Sung Kim, “One-step fabrication of a tunable nanofibrous well insert via electrolyte-assisted electrospinning,” RSC Advances, Vol.7 (2017), No.61, pp.38300-38306. https://doi.org/10.1039/c7ra06629e


Joon-Wan Kim, Thanh VX Nguyen, Kazuya Edamura, Shinichi Yokota, “Triangular prism and slit electrode pair for ECF jetting fabricated by thick micromold and electroforming as micro hydraulic pressure source for soft microrobots,” International Journal of Automation Technology, Vol.10 (2016), No.4 pp.470-478. https://doi.org/10.20965/ijat.2016.p0470

Tomoya Miyoshi, Kazuhiro Yoshida, Joon-wan Kim, Sang In Eom, Shinichi Yokota, “An MEMS-based multiple electro-rheological bending actuator system with an alternating pressure source,” Sensors and Actuators A: Physical, Vol.245 (2016), No.1, pp.68-75. https://doi.org/10.1016/j.sna.2016.04.041


Kazuhiro Yoshida, Noboru Tsukamoto, Joon-wan Kim, Shinichi Yokota, “A study on a soft microgripper using MEMS-based divided electrode type flexible electro-rheological valves,” Mechatronics, Vol.29 (2015) pp.103-109. https://doi.org/10.1016/j.mechatronics.2014.07.007

Dong Han, Joon-wan Kim, Shinichi Yokota, Kazuya Edamura, “ECF micropump fabricated by electroforming with novel self-aligned micro-molding technology,” Journal of Physics: Conference Series, Vol.660 (2015), No.1, pp.012029. https://doi.org/10.1088/1742-6596/660/1/012029


Joon-Wan Kim, Takashi Yoshimoto, Shinichi Yokota, Kazuya Edamura, “Concept of a Focus-Tunable ECF Microlens and Fabrication of a Large Model Prototype,” International Journal of Automation Technology, Vol.6 (2012), No.4, pp.476-481. https://doi.org/10.20965/ijat.2012.p0476

Kazuhiro Yoshida, Tomohisa Muto, Joon-wan Kim, Shinichi Yokota, “An ER Microactuator with Built-in Pump and Valve,” International Journal of Automation Technology, Vol.6 (2012), No.4, pp.468-475. https://doi.org/10.20965/ijat.2012.p0468

Kazuhiro Yoshida, Kazuhito Kamiyama, Joon-wan Kim, Shinichi Yokota, “An intelligent microactuator robust against disturbance using electro-rheological fluid,” Sensors and Actuators A: Physical, Vol.175 (2012), pp.101-107. https://doi.org/10.1016/j.sna.2011.12.049

Joon-wan Kim, Toshiya Suzuki, Shinichi Yokota, Kazuya Edamura, “Tube-type micropump by using electro-conjugated fluid (ECF),” Sensors and Actuators A: Physical, Vol.174 (2012), pp.155-161. https://doi.org/10.1016/j.sna.2011.10.027


Bumhwan Lee, Akihiko Tajima, Joonwan Kim, Yutaka Yamagata, Teruyuki Nagamune, “Fabrication of protein microarrays using the electrospray deposition (ESD) method: Application of microfluidic chips in immunoassay,” Biotechnology and Bioprocess Engineering, Vol.15 (2010), No.1, pp.145-151. https://doi.org/10.1007/s12257-009-3033-0


Joon-wan Kim, Kazuhiro Yoshida, Kumiko Kouda, Shinichi Yokota, “A flexible electro-rheological microvalve (FERV) based on SU-8 cantilever structures and its application to microactuators,” Sensors and Actuators A: Physical, Vol.156 (2009), No.2, pp.366-372. https://doi.org/10.1016/j.sna.2009.10.013

Joon-wan Kim, Yutaka Yamagata, Beomjoon Kim, Toshiro Higuchi, “Direct and dry micro-patterning of nano-particles by electrospray deposition through a micro-stencil mask,” Journal of Micromechanics and Microengineering, Vol.19 (2009), No.2, pp.025021. https://doi.org/10.1088/0960-1317/19/2/025021


Joon-wan Kim, Yutaka Yamagata, Masaya Takasaki, Bum-Hwan Lee, Hitoshi Ohmori, and Toshiro Higuchi, “A device for fabricating protein chips by using a surface acoustic wave atomizer and electrostatic deposition,” Sensors and Actuators B: Chemical, Vol.107 (2005), No.2, pp.535-545. https://doi.org/10.1016/j.snb.2004.11.012


J.W. Kim, Y. Yamagata, S. Morita, S. Moriyasu, H. Ohmori, T. Higuchi, “A Study on the Fabrication of Multi-layer Microstructures Using ELID Grinding and the Thick Photoresist Lithography Technology,” Key Engineering Materials, Vol.238-239 (2003), pp.19-22. https://doi.org/10.4028/www.scientific.net/KEM.238-239.19

Bumhwan Lee, Joon-wan Kim, Kazuhisa Ishimoto, Yutaka Yamagata, Akihiko Tanioka, and Teruyuki Nagamune, “Fabrication of protein microarrays for immunoassay using the electrospray deposition (ESD) method,” Journal of Chemical Engineering of Japan, Vol.36 (2003), No.11, pp.1370-1375. https://doi.org/10.1252/jcej.36.1370


Dicing Machine
Mask Aligner
Thermal Evaporator
RF Magnetron Sputter
Surface Profiler
Laser Lithographer

Contact us

Tokyo Institute of Technology
Department of Mechanical Engineering
Laboratory for Future Interdisciplinary Research of Science and Technology (FIRST)
J3-12, 4259 Nagatsuta-cho, Midori-ku, Yokohama 225-8503, Japan